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洁净等级的划分规格
浏览次数:403发布日期:2020-04-25

等级的划分

YIBANZAIJIEJINGSHISHIYOUDENGJIDE,CAIYONGDUOZHONGGONGXUCAOZUOSHI,YINGGENJUGEGONGXUBUTONGDEYAOQIU,CAIYONGBUTONGDEKONGQIJIEJINGDUDENGJI,YIJUGONGXUYAOQIUQUEDINGDENGJI。

YIYAOGONGYEYAOSHENGCHANGONGXUDEJIEJINGJIBIEHEJIEJINGQUDEHUAFEN,YINGCANZHAO《YAOPINSHENGCHANZHILIANGGUANLIGUIFAN》ZHONGZHIJIHEYUANLIAOYAOGONGYINEIRONGJIHUANJINGQUYUHUAFENERDING。YAOPINSHENGCHANJIEJINGSHIDEKONGQIJIEJINGDUHUAFENWEISIGEDENGJI。

ZAIMANZUSHENGCHANGONGYIYAOQIUDEQIANTIXIA,SHOUXIANYINGCAIYONGDIJIEJINGDENGJIDEJIEJINGSHIHUOJUBUKONGQIJINGHUA;QICIKECAIYONGJUBUGONGZUOQUYUKONGQIJINGHUAHEDIDENGJIQUANSHIKONGQIJINGHUAXIANGJIEHEHUOCAIYONGQUANMIANKONGQIJINGHUA。

YEYOUDEDIFANGANKONGQIGUOLVDEDENGJI

YIBANTONGFENGYONGGUOLVQIFENLEI—DAQICHENJISHUFA

JG/T22-1999(TIDAIGB12218-89)FENJI Ⅰ Ⅱ Ⅲ Ⅳ Ⅴ

LIJING(μm)

≥5.0

≥1.0

≥0.5

OUZHOUXIANXINGFENLEI

BIZHONGFA(%)

Arrestance

BISEFAHUOJISHUFA(%)

Dust-spot

Or Particle Efficiency

ZUIYICHUANTOULIJINGFA(%)

MEIGUOXIAOLVGUIGE

JISHUFA(%)Particle Efficiency

JIZHONGFA(%)

Arrestance

.YAOPINSHENGCHANJIEJINGSHI(QU)DEKONGQIJIEJINGDUHUAFENWEISIGEJIBIE:

 

洁净室(区)空气洁净级别表

JIEJINGDUJIBIE

CHENLIZUIDAYUNXUSHU/LIFANGMI

≥0.5μmCHENLISHU

≥5μmCHENLISHU

WEISHENGWUZUIDAYUNXUSHU

FUYOUJUN/LIFANGMI

CHENJIANGJUN/MIN

100JI

3,500

0

5

1

10,000JI

350,000

2,000

100

3

100,000JI

3,500,000

20,000

500

10

300,000JI

10,500,000

60,000

1000

15

 

ISO14644-1(国际标准)

KONGQIJIEJING

DUDENGJI(N)

DAYUHUODENGYUSUOBIAOLIJINGDELIZIZUIDANONGDUXIANZHI(KONGQILIZISHUGE/LIFANGMI)

0.1um

0.2um

0.3um

0.5um

1.0um

5.0um

ISO Class1

10

2

    

ISO Class2

100

24

10

4

ISO Class3

1,000

237

102

35

8

ISO Class4

10,000

2,370

1,020

352

83

ISO Class5

100,000

23,700

10,200

3,520

832

29

ISO Class6

1,000,000

237,000

102,000

35,200

8,320

293

ISO Class7

   

352,000

83,200

2,930

ISO Class8

   

3,520,000

832,000

29,300

ISO Class9

   

35,200,000

8,320,000

293,000

注:由于涉及测量过程的不确定性,故要求用不超过三个有效的浓度数字来确定等级水平

 

各国洁净度等级近似对照表

GE/M≥0.5um

ISO

14644-1(1999)

US

209E(1992)

US

209D(1988)

EEC

cGMP(1989)

FRANCE

AFNOR(1981)

GERMANY

VDI 2083(1990)

JAPAN

JAOA(1989)

1

-

-

-

-

-

-

-

3.5

2

-

-

-

-

0

2

10.0

-

M1

-

-

-

-

-

35.3

3

M1.5

1

-

-

1

3

100

-

M2

-

-

-

-

-

353

4

M2.5

10

-

-

2

4

1,000

-

M3

-

-

-

-

-

3,530

5

M3.5

100

A+B

4,000

3

5

10,000

-

M4

-

-

-

-

-

35,300

6

M4.5

1,000

1,000

-

4

6

100,000

-

M5

-

-

-

-

-

353,000

7

M5.5

10,000

C

400,000

5

7

1,000,000

-

M6

-

-

-

-

-

3,530,000

8

M6.5

100,000

D

4,000,000

6

8

10,000,000

-

M7

-

-

-

-

-

 

洁净室及洁净区空气中悬浮粒子洁净度等级

空气洁净度等级 [1]  (N)

大于或等于表中粒径的最大浓度限值(pc/m³)

0.1um

0.2um

0.3um

0.5um

1um

5um

1

10

2

    

2

100

24

10

4

  

3

1000

237

102

35

8

 

4(SHIJI)

10000

2370

1020

352

83

 

5(BAIJI)

100000

23700

10200

3520

832

29

6(QIANJI)

1000000

237000

102000

35200

8320

293

7(WANJI)

   

352000

83200

2930

8(SHIWANJI)

   

3520000

832000

29300

9()

   

35200000

8320000

293000

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